Analysis of SAW Sensor Coated by a Biocompatible Parylen Polymer - Cnam - Conservatoire national des arts et métiers
Communication Dans Un Congrès Année : 2023

Analysis of SAW Sensor Coated by a Biocompatible Parylen Polymer

Résumé

Piezoelectric sensors are moving rapidly toward commercialization. The issue of robustness and mechanical characterization has become an important consideration in device design and manufacturing. This paper explores experiments and an in-depth analysis of surface acoustic waves (SAW) manufactured on AT-cut quartz substrate with gold transducers and with biocompatible and hydrophobic parylene C (poly(2-chloro-p-xylylene)) coating layer. We discuss different experimental techniques that use electrical and interferometric measurements to analyze the performance of SAW sensors. The present study highlights several approved SAW device characterization techniques and methods, the ways in which they can be optimized, and the ways in which they can be used to enhance SAW device performances.
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Dates et versions

hal-04278492 , version 1 (10-11-2023)

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Citer

Nikolay Smagin, Marc Duquennoy, Meddy Vanotti, Virginie Blondeau-Patissier, Lionel Rousseau, et al.. Analysis of SAW Sensor Coated by a Biocompatible Parylen Polymer. 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP), May 2023, Valetta, Malta. pp.1-5, ⟨10.1109/DTIP58682.2023.10267938⟩. ⟨hal-04278492⟩
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