ELENA project – electrical nanoscale metrology in industry: key outcomes - Cnam - Conservatoire national des arts et métiers
Conference Papers Year : 2024

ELENA project – electrical nanoscale metrology in industry: key outcomes

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hal-04748829 , version 1 (23-10-2024)

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  • HAL Id : hal-04748829 , version 1

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François Piquemal, Johannes Hoffmann, Khaled Kaja, Brice Gautier, Andreas Hertwig, et al.. ELENA project – electrical nanoscale metrology in industry: key outcomes. Journées Plénières GDR NAME 2024, Nov 2024, Lille (Villeneuve d'Ascq), France. ⟨hal-04748829⟩
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